Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for manufacturing self-aligned titanium salicide using two two-step rapid thermal annealing steps

Method for manufacturing self-aligned titanium salicide using two two-step rapid thermal annealing steps

US Patent 5953633 · Granted Sep 14, 1999

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System, method, and user interface providing customized document portfolio manag2008
Method of forming die seal structures having substrate trenches2001
Two-step metal salicide semiconductor process1999
Method for fabricating a die seal1999
Method for improving the electrical property of gate in polycide structure1999
Masking technology for etching contacts1998
Method for forming a gate-side air-gap structure in a salicide process1998