Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Variable-axis stigmator lens and charged-particle-beam microlithography apparatus comprising same

Variable-axis stigmator lens and charged-particle-beam microlithography apparatus comprising same

US Patent 5952667 · Granted Sep 14, 1999

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Brazing material for bonding; and composite part and cutting tool using same2019
Superabrasive grain setting apparatus2011
Superabrasive grain setting method2011
Throw-away tip2003
Charged-particle optical systems and pattern transfer apparatus comprising same2000
Drug dispensing apparatus1995
Drug dispenser1993
Drug packing apparatus1992
Drug dispensing apparatus1987