Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of resistless patterning of a substrate for implantation

Method of resistless patterning of a substrate for implantation

US Patent 5904552 · Granted May 18, 1999

Estimated economic value: $16,743,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Temporary affixing device2012
Semiconductor structure including a partially annealed layer and method of formi2003
Laser cleaning process for semiconductor material and the like2002
Sparse-carrier devices and method of fabrication2002
Quantum deposition distribution control2001
Rapid thermal processing susceptor2001
Sparse-carrier devices and method of fabrication2001
Silicon delta-doped gallium arsenide/indium arsenide heterojunction OHMIC contac2001
Resistless device fabrication method2000
Ohmic contact and method of manufacture2000
Selective metallization/deposition for semiconductor devices1999
Methods of fabricating and contacting ultra-small semiconductor devices1999