Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Planar waveguides

Planar waveguides

US Patent 5904491 · Granted May 18, 1999

Estimated economic value: $148,837,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of fabricating a planar waveguide structure1999
Planar optical waveguide1999
Planar wave guide cladding1999
Semiconductor etching process1995
Process for forming isolation trenches in silicon semiconductor bodies1990
Pulsed plasma apparatus and process1990
Plasma etching process1989
Method of surface treatment1988
Optical fibre manufacture1986