Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Alignment method for multi-level deep x-ray lithography utilizing alignment holes and posts

Alignment method for multi-level deep x-ray lithography utilizing alignment holes and posts

US Patent 5866281 · Granted Feb 2, 1999

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Acceleration sensor and method for operating an acceleration sensor2016
Method for controlling a device and a device for controlling the device2014
Acceleration sensor method for operating an acceleration sensor2014
Method of manufacturing vibrating micromechanical structures2013
Sensor module2013
Method of manufacturing vibrating micromechanical structures2010
Micromechanical sensor having fault identification2009
Z offset MEMS device2009
Method of manufacturing vibrating micromechanical structures2008
Sensor module2008
Bi-directional micromechanical latching linear actuator2003
Micromechanical spin angular acceleration sensor2003