Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate support shield in wafer processing reactors

Substrate support shield in wafer processing reactors

US Patent 5855687 · Granted Jan 5, 1999

Estimated economic value: $50,013,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Low temperature deposition of iridium containing films2024
Systems for cooling RF heated chamber components2024
Low temperature deposition of iridium containing films2023
Apparatus for increasing flux from an ampoule2023
Multi-zone cooling of plasma heated window2022
Systems for cooling RF heated chamber components2022
Apparatus and method for providing uniform flow of gas2022
Internal plasma grid for semiconductor fabrication2021
Apparatus for increasing flux from an ampoule2021
Multi-zone pedestal for plasma processing2021
High temperature process chamber lid2020
Systems for cooling RF heated chamber components2020