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Home › Porous dielectric material with improved pore surface properties for electronics applications

Porous dielectric material with improved pore surface properties for electronics applications

US Patent 5847443 · Granted Dec 8, 1998

Estimated economic value: $48,241,000 ⓘ

Assignee

Texas Instruments

Inventors

Chi-Chen Cho (6 patents)
Bruce E. Gnade (79 patents)
Douglas M. Smith (114 patents)
Jin Changming (2 patents)
William C. Ackerman (23 patents)
Gregory C. Johnston (2 patents)

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