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Home › Method for forming a ferroelectric material film by the sol-gel method, along with a process for a production of a capacitor and its raw material solution

Method for forming a ferroelectric material film by the sol-gel method, along with a process for a production of a capacitor and its raw material solution

US Patent 5840615 · Granted Nov 24, 1998

Estimated economic value: $15,060,000 ⓘ

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