Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate carrier having a streamlined shape and method for thin film formation

Substrate carrier having a streamlined shape and method for thin film formation

US Patent 5814561 · Granted Sep 29, 1998

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Devices and methods for determining and/or isolating cells such as circulating c2021
Calcium-sensing receptor 2 (CaR2) and methods for using2013
Compositions and methods for making mutations in cell lines and animals2012
Compositions and methods for making mutations in cell lines and animals2011
Methods for mutating genes in cells using insertional mutagenesis2010
Apparatus and method for polishing a substrate2001
Structure and method for three chamber CMP polishing head2000
Substrate carrier having a streamlined shape and method for thin film formation1999
Pneumatic polishing head for CMP apparatus1997
Conditioner for a polishing pad and method therefor1995
Semiconductor wafer carrier and method1995
Dual-dipole electrostatic air filter1990