Film bulk acoustic wave device

Assignee

• Mitsubishi Electric

Inventors

• Shusou Wadaka (23 patents)
• Koichiro Misu (16 patents)
• Tsutomu Nagatsuka (16 patents)
• Tomonori Kimura (72 patents)
• Shunpei Kameyama (3 patents)
• Chisako Maeda (6 patents)
• Akira Yamada (290 patents)
• Toshihisa Honda (7 patents)

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