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Home › Process for electrical insulation in microelectronics, applicable in narrow cavities, by deposition of oxide in the viscous state and corresponding device

Process for electrical insulation in microelectronics, applicable in narrow cavities, by deposition of oxide in the viscous state and corresponding device

US Patent 5786039 · Granted Jul 28, 1998

Estimated economic value: $1,681,000 ⓘ

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