Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gate valve for regulating gas flow in semiconductor manufacturing

Gate valve for regulating gas flow in semiconductor manufacturing

US Patent 5755255 · Granted May 26, 1998

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Vacuum gate valve2021
Treatment device and exhaust switching device therefor, and exhaust switching un2019
Vacuum gate valve2019
Pressure control butterfly valve with opening/closing mechanism2012
Slide valve2010
Diaphragm valve2008
Composite valve for gas supply system2006
Non-rubbing gate valve for semiconductor fabrication apparatus2006
Valve for controlling flow rate of gas2003
Valve for controlling flow rate of gas2001
Vacuum exhaust valve1997
Slow vent valve1995