Etching agent, electronic device and method of manufacturing the device

Assignee

• Frontec Incorporated
• Unknown

Inventors

• Matagoro Maeno (13 patents)
• Masayuki Miyashita (12 patents)
• Hirohisa Kikuyama (32 patents)
• Tatsuhiro Yabune (9 patents)
• Jun Takano (48 patents)
• Hirofumi Fukui (48 patents)
• Satoshi Miyazawa (23 patents)
• Chisato Iwasaki (15 patents)
• Tadahiro Ohmi (600 patents)
• Yasuhiko Kasama (42 patents)
• Hitoshi Seki (18 patents)

View full patent text on Google Patents →