Assignee
Inventors
- Kazuo Maeda (122 patents)
- Kouichi Ohira (22 patents)
- Hiroshi Chino (17 patents)
{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Apparatus for manufacturing semiconductor device", "item": "https://www.patentleaderboard.com/patent/5679165"}]}
Skip to contentUS Patent 5679165 · Granted Oct 21, 1997