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Home › Platinum silicide Schottky diodes in a titanium-silicided CMOS-based high performance BICMOS process

Platinum silicide Schottky diodes in a titanium-silicided CMOS-based high performance BICMOS process

US Patent 5672898 · Granted Sep 30, 1997

Estimated economic value: $22,301,000 ⓘ

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