Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for fabricating InP diffraction grating and distributed feedback laser

Method for fabricating InP diffraction grating and distributed feedback laser

US Patent 5668047 · Granted Sep 16, 1997

Estimated economic value: $15,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of measuring micro-structure, micro-structure measurement apparatus, and 2009
Distributed feedback type semiconductor laser device having gradually-changed co2003
Method for manufacturing diffraction grating and method for manufacturing semico2002
Distributed-feedback semiconductor laser2000
Method of forming micropattern1997