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Home › Edgeless, self-aligned, differential oxidation enhanced and difusion-controlled minimum-geometry antifuse and method of fabrication

Edgeless, self-aligned, differential oxidation enhanced and difusion-controlled minimum-geometry antifuse and method of fabrication

US Patent 5619063 · Granted Apr 8, 1997

Estimated economic value: $6,671,000 ⓘ

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