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Home › Self-calibration system and method for determining the adequacy of an interferometer angle and surface curvatures in an inspection system for determining disparity between two surfaces

Self-calibration system and method for determining the adequacy of an interferometer angle and surface curvatures in an inspection system for determining disparity between two surfaces

US Patent 5600439 · Granted Feb 4, 1997

Estimated economic value: $16,107,000 ⓘ

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