Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Micromechanical anchor structure

Micromechanical anchor structure

US Patent 5583291 · Granted Dec 10, 1996

Estimated economic value: $9,281,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Differential capacitor structure2001
Differential capacitor structure2001
Sensing structure comprising a movable mass and a self-test structure2000
Sensing structure comprising a movable mass and a self-test structure2000
Sensor devices having a movable structure1999
Semiconductor device having a movable gate1998
Monolithic semiconductor device having a microstructure and a transistor1998
Method for forming a semiconductor sensor FET device1997
Electronic device enclosure including a conductive cap and substrate1996
Electronic device enclosure including a conductive cap and substrate1996
Three axes accelerometer1996
Laterally sensitive accelerometer and method for making1994