Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Wafer installing cassette for semiconductor manufacturing apparatus

Wafer installing cassette for semiconductor manufacturing apparatus

US Patent 5577621 · Granted Nov 26, 1996

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Feedback device and method for providing thermal feedback by means of same2023
Feedback device and thermal feedback providing method using same2023
Feedback device and method for providing thermal feedback by means of same2022
Feedback device and thermal feedback providing method using same2021
Feedback device and method for providing thermal feedback by means of same2020
Feedback device and method of providing thermal feedback using the same2020
Feedback device providing thermal feedback2020
Feedback device providing thermal feedback2019
System and method for emergency alarm2010
Method of forming a thin film2003
Chemical deposition reactor and method of forming a thin film using the same2003
Method for forming a three-component nitride film containing metal and silicon2002