Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › High speed pump for a processing vacuum chamber

High speed pump for a processing vacuum chamber

US Patent 5520002 · Granted May 28, 1996

Estimated economic value: $166,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Actuator, actuator module, endoscope, endoscope module, and controlling method2023
Actuator including elastomer layer and elastic electrodes and method for manufac2022
Actuator, driving member, tactile sense presenting device, and driving device2022
Evaporation mask and method of manufacturing display unit2017
Vibrating device, jet flow generating device, electronic device, and manufacturi2012
Gas ejector, electronic device, and gas-ejecting method2011
Jet flow generating apparatus, electronic apparatus, and jet flow generating met2011
Jet generating device and electronic apparatus2010
Optical multilayer structure, optical switching device, and image display2006
Optical multilayer structure, optical switching device, and image display2006
Optical multilayer structure, optical switching device, and image display2005
Optical multilayer structure and its production method, optical switching device2005