Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Holder mechanism for simultaneously tilting and rotating a wafer cassette

Holder mechanism for simultaneously tilting and rotating a wafer cassette

US Patent 5507614 · Granted Apr 16, 1996

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Bicycle and motorcycle riding simulation system1994
Apparatus for delivery of a liquid1992
Apparatus and method for alignment of adjacent surfaces1991
Apparatus and method for aligning automated loading and unloading arms1991
Tube particle vacuum cleaner1990
Method and apparatus for testing sputter targets1989
Anode cathode parallelism gap gauge1989
Cross-mask holder device1988
Centering/positioning apparatus for wafer and vacuum chuck1987
Semiconductor wafer guides1987
Centering/positioning apparatus for wafer and vacuum chuck1987