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Home › Boron-containing organic group-V compounds useful for gas phase deposition of the group-V element on substrates

Boron-containing organic group-V compounds useful for gas phase deposition of the group-V element on substrates

US Patent 5487357 · Granted Jan 30, 1996

Estimated economic value: $137,937,000 ⓘ

Assignee

Merck

Inventors

Ludwig Pohl (59 patents)
Herbert Schumann (14 patents)
Christian Marschall (3 patents)

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