Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Magnetic system and method for uniformly scanning heavy ion beams

Magnetic system and method for uniformly scanning heavy ion beams

US Patent 5481116 · Granted Jan 2, 1996

Estimated economic value: $1,143,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Ion beam scanner for an ion implanter2017
Ion implant apparatus and a method of implanting ions2014
Ion beam bending magnet for a ribbon-shaped ion beam2014
Ion implant apparatus and a method of implanting ions2014
Software execution using multiple initialization modes2013
Ion beam apparatus and method employing magnetic scanning2013
Ion beam apparatus and method for ion implantation2012
Ion implantation apparatus2011
Ion implantation apparatus and a method2011
Ion source assembly for ion implantation apparatus and a method of generating io2011
Ion beam apparatus and method employing magnetic scanning2010
Ion implanting apparatus2006