Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Shield assembly for semiconductor wafer supports

Shield assembly for semiconductor wafer supports

US Patent 5476520 · Granted Dec 19, 1995

Estimated economic value: $29,634,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Oxidant enhanced Feammox activity2025
Biodegradation of fluorochemicals2025
Feammox activity in bioelectrochemical reactors2023
Methods and compositions for nitrogen removal using Feammox microorganisms2019
Methods and compositions for nitrogen removal using feammox microorganisms2017
Tandem process chamber2010
Method of depositing an amorphous carbon layer2008
Method of depositing an amorphous carbon layer2007
Method of depositing an amorphous carbon layer2005
Method for depositing an amorphous carbon layer2003
Method and apparatus for reducing perfluorocompound gases from substrate process2003
Load-lock with external staging area2002