Apparatus for polishing the periphery portion of a wafer

Assignee

• Shin-Etsu Handotai Co.
• Fujikoshi Machinery

Inventors

• Fumihiko Hasegawa (30 patents)
• Tatsuo Ohtani (14 patents)
• Yasuyoshi Kuroda (36 patents)
• Koichiro Ichikawa (10 patents)
• Yasuo Inada (13 patents)

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