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Home › Spatial light modulator element with amorphous film of germanium, carbon and silicon for light blocking layer

Spatial light modulator element with amorphous film of germanium, carbon and silicon for light blocking layer

US Patent 5471331 · Granted Nov 28, 1995

Estimated economic value: $20,000 ⓘ

Assignee

Inventors

Kuniharu Takizawa (12 patents)
Hiroshi Kikuchi (274 patents)
Yukihisa Osugi (27 patents)
Shoji Tange (5 patents)

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