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Home › Method of making TA.sub.2 O.sub.5 thin film by low temperature ozone plasma annealing (oxidation)

Method of making TA.sub.2 O.sub.5 thin film by low temperature ozone plasma annealing (oxidation)

US Patent 5468687 · Granted Nov 21, 1995

Estimated economic value: $10,808,000 ⓘ

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