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Home › Apparatus for polishing a diamond or carbon nitride film by reaction with oxygen transported to the film through a superionic conductor in contact with the film

Apparatus for polishing a diamond or carbon nitride film by reaction with oxygen transported to the film through a superionic conductor in contact with the film

US Patent 5468326 · Granted Nov 21, 1995

Estimated economic value: $10,808,000 ⓘ

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