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Home › Ultraviolet resistive antireflective coating of Ta.sub.2 O.sub.5 doped with Al.sub.2 O.sub.3 and method of fabrication

Ultraviolet resistive antireflective coating of Ta.sub.2 O.sub.5 doped with Al.sub.2 O.sub.3 and method of fabrication

US Patent 5457570 · Granted Oct 10, 1995

Estimated economic value: $5,787,000 ⓘ

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