Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Vacuum processing apparatus and exhaust system that prevents particle contamination

Vacuum processing apparatus and exhaust system that prevents particle contamination

US Patent 5433780 · Granted Jul 18, 1995

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plane heater2012
Shower head and film-forming device using the same2011
Gasification monitor, method for detecting mist, film forming method and film fo2011
Loading table and heat treating apparatus having the loading table2010
Gasification monitor, method for detecting mist, film forming method and film fo2007
Valve and vacuum processing device with the valve2004
Gas processing apparatus for object to be processed2003
Gas processing apparatus baffle member, and gas processing method2002
Gas processing apparatus for object to be processed2002
Vacuum processing apparatus2001
Film forming apparatus and method2000
Process gas delivery system for CVD having a cleaning subsystem2000