Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Spectrum analyzer in an ion implanter

Spectrum analyzer in an ion implanter

US Patent 5384465 · Granted Jan 24, 1995

Estimated economic value: $11,488,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Cathode and counter-cathode arrangement in an ion source2012
Ion sources for ion implantation apparatus2009
Ion implanter electrodes2006
Apparatus and method for monitoring and tuning an ion beam in ion implantation a2005
Ion sources for ion implantation apparatus2005
Ion beam generator2004
Ion beam generation apparatus2003
Ion beam apparatus and a method for neutralizing space charge in an ion beam2003
Ion implanter with post mass selection deceleration1999
Spectrum analyzer in an ion implanter1995
Spectrum analyzer in an ion implanter1995
Spectrum analyzer in an ion implanter1995