Photo resist film application mechanism

Assignee

• IBM

Inventors

• William A. Brady (2 patents)
• See Ark Chan (1 patents)
• Norbert Freisitzer (2 patents)
• Rolf G. Meinert (4 patents)
• Prakash Nahata (1 patents)
• Julius J. Perlini (3 patents)
• Mario G. M. Tavares (2 patents)
• Douglas A. West (1 patents)

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