Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Magnetron sputtering cathode for vacuum coating apparatus

Magnetron sputtering cathode for vacuum coating apparatus

US Patent 5284564 · Granted Feb 8, 1994

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and system for naturally oxidizing a substrate2017
Coating substrates with an alloy by means of cathode sputtering2016
Sputtering cathode and device and method for coating a substrate with several la2010
Arrangement for orienting the magnetization direction of magnetic layers2004
Apparatus for coating substrates especially with magnetizable materials1999
Device for suppressing flashovers in cathode sputtering installations1997
Apparatus for coating a substrate by magnetron sputtering1995
Stationary magnetron sputtering cathode for a vacuum coating apparatus1993