Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of integrated circuit fabrication having planarized dielectrics

Method of integrated circuit fabrication having planarized dielectrics

US Patent 5268332 · Granted Dec 7, 1993

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Integrated circuit structure and method therefore2003
Method for forming trench isolation2003
Method of making a semiconductor device using chemical-mechanical polishing havi1999
Method for making a capacitor1998
Method for integrated circuit fabrication including linewidth control during etc1994
Method of making integrated circuits having a planarized dielectric1991