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Home › Low dielectric constant, low moisture uptake polyimides and copolyimides for interlevel dielectrics and substrate coatings

Low dielectric constant, low moisture uptake polyimides and copolyimides for interlevel dielectrics and substrate coatings

US Patent 5268193 · Granted Dec 7, 1993

Estimated economic value: $63,731,000 ⓘ

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