Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus and process for glow discharge comprising substrate temperature control by shutter adjustment

Apparatus and process for glow discharge comprising substrate temperature control by shutter adjustment

US Patent 5264256 · Granted Nov 23, 1993

Estimated economic value: $3,070,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Suspension system for a vehicle with a tank for liquified gas2007
System and method for optically sensing defects in OPC devices2005
Coating method and apparatus with substrate extension device2003
Low cost, compressed gas fuel storage system2002
Compressed gas manifold2001
Compressed gas fuel storage system2001
Viscoelastic memory means and flow control valve and use thereof to produce a si2000
Method to maintain the levelness of a heated crucible1996
Method to maintain the levelness of a heated crucible1996
Method to maintain the levelness of a heated crucible1996
Method to maintain the levelness of a heated crucible1996
Method to maintain the levelness of a heated crucible1996