{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Apparatus to deposit multilayer films", "item": "https://www.patentleaderboard.com/patent/5240583"}]}
Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus to deposit multilayer films

Apparatus to deposit multilayer films

US Patent 5240583 · Granted Aug 31, 1993

Estimated economic value: $22,852,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Off-axis radio frequency diode apparatus for sputter deposition of RLG mirrors1996
Apparatus for monitoring ion beams with an electrically isolated aperture1995
Method to deposit multilayer films1994
Ion beam gun1993
Low cost ring laser angular rate sensor including thin fiber glass bonding of co1991
Low cost ring laser angular rate sensor1989
Silicon substrate mirror assembly for lasers1989