Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods and apparatus for cryogenic vacuum pumping with reduced contamination

Methods and apparatus for cryogenic vacuum pumping with reduced contamination

US Patent 5231839 · Granted Aug 3, 1993

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Precise measurement system for barrier materials2004
Solar-powered area light1998
Cryogenic vacuum pump with expander speed control1995
Plasma reactor and method therefor1983
Plasma reactor and method therefor1981