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Home › Hexahydroxybenzophenone sulfonate esters of diazonaphthoquinone sensitizers and positive photoresists employing same

Hexahydroxybenzophenone sulfonate esters of diazonaphthoquinone sensitizers and positive photoresists employing same

US Patent 5206348 · Granted Apr 27, 1993

Estimated economic value: $8,756,000 ⓘ

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