Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Ion beam implanter for providing cross plane focusing

Ion beam implanter for providing cross plane focusing

US Patent 5177366 · Granted Jan 5, 1993

Estimated economic value: $7,299,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for controlling a gas cluster ion beam formed from a gas mi2010
Gas cluster ion beam size diagnostics and workpiece processing2004
Detector and method for cluster ion beam diagnostics2004
Gas cluster ion beam low mass ion filter2003
Ionizer for gas cluster ion beam formation2003
Enhanced etching/smoothing of dielectric surfaces2003
Enhanced etching/smoothing of dielectric surfaces2001
Reduced path ion beam implanter1992
Reduced path ion beam implanter1992
Beam pattern control system for an ion implanter1990
Wafer rotation control for an ion implanter1990
SKM ion source1990