Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Chamber having a hot zone and a cold zone and at least one gas inlet tube

Chamber having a hot zone and a cold zone and at least one gas inlet tube

US Patent 5174748 · Granted Dec 29, 1992

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of manufacturing a spring of the cylindrical type to be used at high temp1989
Integrated circuit structure for a quality check of a semiconductor substrate wa1988
Portable, identifying element constructed as a lamination of sheets1983
Method of providing metal bumps on an apertured substrate1980