Method for photo annealing non-single crystalline semiconductor films

Assignee

• Semiconductor Energy Laboratory

Inventors

• Shunpei Yamazaki (6,629 patents)
• Kunio Suzuki (70 patents)
• Susumu Nagayama (22 patents)
• Takashi Inujima (33 patents)
• Masayoshi Abe (68 patents)
• Takeshi Fukada (70 patents)
• Mikio Kinka (15 patents)
• Ippei Kobayashi (31 patents)
• Katsuhiko Shibata (26 patents)
• Masato Susukida (23 patents)
• Kaoru Koyanagi (14 patents)

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