Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › TRD temperature sensor

TRD temperature sensor

US Patent 5140609 · Granted Aug 18, 1992

Estimated economic value: $16,282,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Cadmium sulfide quantum dots2020
Image acquisition system, image acquisition method, and inspection system2018
Apparatus and methods for inspecting extreme ultra violet reticles2017
In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning2017
Inspecting high-resolution photolithography masks2017
Apparatus and methods for inspecting extreme ultra violet reticles2015
Method and apparatus for inspecting a reflective lithographic mask blank and imp2014
Inspection systems and methods for detecting defects on extreme ultraviolet mask2014
System for detecting anomalies and/or features of a surface2011
Inspection methods and systems for lithographic masks2009
Illumination apparatus and methods2008
Systems and methods for modifying a reticle's optical properties2007