Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Thin dielectric layer on a substrate

Thin dielectric layer on a substrate

US Patent 5139869 · Granted Aug 18, 1992

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Reduction of sheet resistance of phosphorus implanted poly-silicon2011
Method for forming a thin dielectric layer on a substrate1993
Method for forming a thin dielectric layer on a substrate1993
Method for forming a thin dielectric layer on a substrate1993
Method for forming a thin dielectric layer on a substrate1991
Method for forming a thin dielectric layer on a substrate1991
Method for forming a thin dielectric layer on a substrate1991
Method for fabricating a semiconductor integrated circuit structure having a sub1989
Method for fabricating a semiconductor integrated circuit structure having a sub1989