Atomizer for forming a thin film

Assignee

• Taiyo Yuden Co.

Inventors

• Mizuho Imai (12 patents)
• Atsuo Ito (49 patents)
• Mikio Sekiguchi (6 patents)
• Hideyo Iida (15 patents)
• Kikuji Fukai (12 patents)
• Komei Kato (14 patents)

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