Assignee
Inventors
- Atsushi Hirokawa (7 patents)
- Kunihiko Ozaki (8 patents)
{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Process for the manufacture of deposition films and apparatus therefor", "item": "https://www.patentleaderboard.com/patent/5107791"}]}
Skip to contentUS Patent 5107791 · Granted Apr 28, 1992