Apparatus for producing Czochralski-grown single crystals

Assignee

• Shin-Etsu Handotai Co.

Inventors

• Koji Mizuishi (13 patents)
• Michiaki Oda (15 patents)
• Yasushi Nakamura (135 patents)
• Seiichiro Ohtsuka (5 patents)
• Atsushi Shiozawa (2 patents)
• Fumio Yamada (1 patents)
• Masahiro Mashimo (1 patents)
• Tooru Ohara (1 patents)
• Eizi Namiki (1 patents)

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