Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Sparger plate for ozone gas diffusion

Sparger plate for ozone gas diffusion

US Patent 5082518 · Granted Jan 21, 1992

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

High temperature ceramic nut1995
High temperature ceramic nut1994
Wafer carrier holder for wafer carriers1992
Wafer carrier holder for wafer carriers1992
End effector1989
Flexible carrier for semiconductor wafer cassettes1988