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Home › Method for depositing a Tio.sub.2 layer using a periodic and simultaneous tilting and rotating platform motion

Method for depositing a Tio.sub.2 layer using a periodic and simultaneous tilting and rotating platform motion

US Patent 5081069 · Granted Jan 14, 1992

Estimated economic value: $5,063,000 ⓘ

Assignee

Texas Instruments

Inventors

Sidney G. Parker (5 patents)
Jerry Wood (4 patents)
Robert T. Turner (1 patents)
Craig A. Fischer (2 patents)

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